In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror
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چکیده
منابع مشابه
In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror "2279
The collimation of free-space light propagating in-plane with respect to the substrate is an important performance factor in optical microelectromechanical systems (MEMS). This is usually carried out by integrating micro lenses into the system, which increases the cost of fabrication/assembly in addition to limiting the wavelength working range of the system imposed by the dispersion characteri...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8050134